Studying of various nanolithography methods by using Scanning Probe Microscope

Document Type : Review


Nanotechnology research center, Research institute of petroleum industry (RIPI), Tehran, Iran.



The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithographical methods mostly based on making nano-structures is presented.